Monolithic coupling of a SU8 waveguide to a silicon photodiode
نویسندگان
چکیده
We present quantitative results of light coupling from SU8 waveguides into silicon p-n photodiodes in monolithically integrated structures. Multimode, 12 mm thick, and 20 mm wide SU8 waveguides were fabricated to overlap 403180 mm photodiodes, with three different waveguide-photodiode overlap lengths. The attenuation due to leaky-mode coupling in the overlap area was then calculated from photocurrent measurements. The overlap attenuation ranged from a minimum of 2.2 dB per mm overlap length to a maximum of about 3 dB/mm, comparing favorably with reported nonpolymeric waveguide-Si photodiode attenuations. © 2003 American Institute of Physics. @DOI: 10.1063/1.1625778#
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